Boron–carbide barrier layers in scandium–silicon multilayers
نویسندگان
چکیده
منابع مشابه
Mo/Si Multilayers with Different Barrier Layers for Applications as Extreme Ultraviolet Mirrors
Pulsed laser deposition (PLD) and magnetron sputter deposition (MSD) have been used to prepare different types of Mo/Si multilayers for the extreme ultraviolet (EUV) spectral range. In the case of PLD prepared Mo/Si multilayers the deposition of 0.3–0.5 nm thick carbon barrier layers at the interfaces leads to a substantial improvement of the interface quality. This can be deduced from Cu-Kα re...
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ژورنال
عنوان ژورنال: Thin Solid Films
سال: 2004
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2004.08.153